Patents/Inventors

Masayuki Otsuji

KyotoJP8 patents

6 Patents

US125764252026
Substrate Processing Method
SCREEN Holdings Co., Ltd.
0 cites
US125575782026
Substrate Processing Method and Sublimation Drying Processing Agent
SCREEN HOLDINGS CO., Ltd.
0 cites
US123621672025
Method for Producing Liquid Containing Sublimable Substance, Substrate Drying Method, and Substrate Processing Apparatus
SCREEN Holdings Co., Ltd.
0 cites
US121597832024
Method of Restoring Collapsed Pattern, Substrate Processing Method, and Substrate Processing Device
SCREEN Holdings Co., Ltd.
0 cites
US118517452023
Substrate Processing Method, Substrate Processing Apparatus and Pre-drying Processing Liquid
SCREEN Holdings Co., Ltd.
0 cites
US117696632023
Substrate Processing Method and Substrate Processing Apparatus
SCREEN HOLDINGS CO., Ltd.
0 cites