Patents/Inventors

Masayuki Hatano

Yokohama KanagawaJP3 patents

4 Patents

US122711112025
Template, Manufacturing Method of Template, and Manufacturing Method of Semiconductor Device
Kioxia Corporation
0 cites
US120726222024
Imprint Method, Method of Manufacturing Semiconductor Device, and Imprint Device
Kioxia Corporation
0 cites
US119538252024
Imprint Apparatus, Imprint Method, and Manufacturing Method of Semiconductor Device
Kioxia Corporation
0 cites
US118374692023
Imprint Apparatus, Imprint Method, and Method of Manufacturing Semiconductor Device
Kioxia Corporation
0 cites