Patents/Inventors

Masayoshi Sagehashi

JoetsuJP5 patents

6 Patents

US122756932025
Onium Salt, Chemically Amplified Resist Composition and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US120322892024
Polymer, Chemically Amplified Resist Composition and Patterning Process
Shin-etsu Chemical Co., Ltd.
0 cites
US120136392024
Positive Resist Material and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US116626632023
Substrate Protective Film-forming Composition and Pattern Forming Process
Shin-etsu Chemical Co., Ltd.
0 cites
US115795292023
Positive Resist Composition and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US115488442023
Monomer, Polymer, Negative Resist Composition, Photomask Blank, and Resist Pattern Forming Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites