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Inventors
Masatoshi Onoda
Shiga
JP
2 patents
3 Patents
US12249479
2025
Substrate Holding Device
Nissin Ion Equipment Co., Ltd.
0 cites
US11776839
2023
Substrate Holding Device
NISSIN ION EQUIPMENT CO., Ltd.
0 cites
US11751287
2023
Substrate Heating Device
HIMEJI RIKA CO., Ltd.
0 cites