13 Patents
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- US124986352025Resist Composition, Method of Forming Resist Pattern, and Compound
TOKYO OHKA KOGYO CO., Ltd.
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- US118290682023Resist Composition, Method of Forming Resist Pattern, Compound, and Resin
Tokyo Ohka Kogyo Co., Ltd.
0 cites - US117809462023Alternating Copolymer, Method of Producing Alternating Copolymer, Method of Producing Polymeric Compound, and Method of Forming Resist Pattern
TOKYO OHKA KOGYO CO., Ltd.
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- US117477242023Organically Modified Metal Oxide Nanoparticles, Organically Modified Metal Oxide Nanoparticles-containing Solution, Organically Modified Metal Oxide Nanoparticles-containing Resist Composition, and Resist Pattern Forming Method
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
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- US116676052023Resist Composition, Method of Forming Resist Pattern, Compound, Acid Generator, and Method of Producing Compound
TOKYO OHKA KOGYO CO., Ltd.
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