Patents/Inventors

Masatomo Kita

MiyagiJP15 patents

15 Patents

US125575852026
Processing System and Transfer Method
TOKYO ELECTRON LIMITED
0 cites
US124761212025
Transfer Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123410462025
Transfer Apparatus and Transfer Method
TOKYO ELECTRON LIMITED
0 cites
US122857862025
Substrate Processing Apparatus, Purge Gas Control Method, and Vacuum Transfer Chamber Cleaning Method
TOKYO ELECTRON LIMITED
0 cites
US121989522025
Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US121911882025
Transfer Device, Transfer System, and End Effector
TOKYO ELECTRON LIMITED
0 cites
US121658932024
Substrate Processing System and Transfer Method
Tokyo Electron Limited
0 cites
US121319372024
Transfer System, Transfer Device, and Transfer Method
TOKYO ELECTRON LIMITED
0 cites
US121257382024
Storage Module, Substrate Processing System, and Method of Transferring Consumable Member
TOKYO ELECTRON LIMITED
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US120805722024
Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
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US119942342024
Gate Valve and Driving Method
Tokyo Electron Limited
0 cites
US119553562024
Processing System and Transfer Method
TOKYO ELECTRON LIMITED
0 cites
US119488162024
Transfer Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118625062024
Substrate Processing System, Vacuum Substrate Transfer Module, and Substrate Transfer Method
TOKYO ELECTRON LIMITED
0 cites
US117911802023
Substrate Transfer System and Load Lock Module
TOKYO ELECTRON LIMITED
0 cites