Masato Hayashi

5 Patents

• US126107832026

  Substrate Transfer Apparatus, State Determination Method, and Computer Storage Medium

  Tokyo Electron Limited

  0 cites
• US120322942024

  Abnormality Detection Device of Chemical Solution, Liquid Processing Device, Substrate Processing Apparatus, Abnormality Detection Method of Chemical Solution, Liquid Processing Method, and Substrate Processing Method

  TOKYO ELECTRON LIMITED

  0 cites
• US119202402024

  Substrate Processing Apparatus, State Determination Method and Computer-readable Recording Medium

  TOKYO ELECTRON LIMITED

  0 cites
• US119064142024

  Foreign Substance Detection Device and Foreign Substance Detection Method

  TOKYO ELECTRON LIMITED

  0 cites
• US118798392024

  Substrate Processing Apparatus and Substrate Processing Method

  TOKYO ELECTRON LIMITED

  0 cites