Patents/Inventors

Masato Araki

NirasakiJP5 patents

6 Patents

US124160752025
Film-forming Method and Film-forming System
Tokyo Electron Limited
0 cites
US123449302025
Deposition Method and Deposition Apparatus
Tokyo Electron Limited
0 cites
US119938412024
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119843192024
Substrate Processing Method and Film Forming System
TOKYO ELECTRON LIMITED
0 cites
US118113872023
Elastic Wave Device
Murata Manufacturing Co., Ltd.
0 cites
US117027342023
Method for Forming Ruthenium Film and Apparatus for Forming Ruthenium Film
Tokyo Electron Limited
0 cites