6 Patents
- US125664232026Temperature Control Method, Method of Manufacturing Semiconductor Device, Non-transitory Computer-readable Recording Medium and Substrate Processing Apparatus
Kokusai Electric Corporation
0 cites - US125037702025Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
Kokusai Electric Corporation
0 cites - US124615072025Substrate Processing Apparatus, Substrate Processing Method, Semiconductor Device Manufacturing Method, and Control Program
KOKUSAI ELECTRIC CORPORATION
0 cites - US122939302025Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Heater
Kokusai Electric Corporation
0 cites - US120853382024Heater, Temperature Control System, and Processing Apparatus
KOKUSAI ELECTRIC CORPORATION
0 cites - US117610872023Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
Kokusai Electric Corporation
0 cites