Patents/Inventors

Masashi Enomoto

KumamotoJP13 patents

14 Patents

US124761102025
Substrate Processing Module
TOKYO ELECTRON LIMITED
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US124426352025
Substrate Processing Apparatus, Substrate Processing Method, and Storage Medium
Tokyo Electron Limited
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US123792002025
Peripheral Edge Processing Apparatus, Peripheral Edge Processing Method, and Computer-readable Recording Medium
TOKYO ELECTRON LIMITED
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US122283902025
Information Processing Apparatus, Information Processing Method and Computer-readable Recording Medium
TOKYO ELECTRON LIMITED
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US121971292025
Substrate Treatment Method and Substrate Treatment System
Tokyo Electron Limited
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US121481472024
Substrate Inspection Device, Substrate Inspection Method, and Storage Medium
TOKYO ELECTRON LIMITED
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US121237782024
Thermal Imaging Sensor for Integration Into Track System
Tokyo Electron Limited
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US120515872024
Substrate Processing Apparatus, Estimation Method of Substrate Processing and Recording Medium
TOKYO ELECTRON LIMITED
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US120026762024
Method for Forming Mask Pattern, Storage Medium, and Apparatus for Processing Substrate
TOKYO ELECTRON LIMITED
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US118760222024
Substrate Treatment Method and Substrate Treatment System
Tokyo Electron Limited
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US118090912023
Substrate Processing Apparatus and Processing Condition Adjustment Method
Tokyo Electron Limited
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US116370312023
Systems and Methods for Spin Process Video Analysis During Substrate Processing
Tokyo Electron Limited
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US116044152023
Substrate Processing Method, Substrate Processing Apparatus, and Computer Readable Recording Medium
TOKYO ELECTRON LIMITED
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US115944242023
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
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