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Inventors
Masaru Takimoto
Yokohama
JP
4 patents
3 Patents
US12598949
2026
Stage and Method of Manufacturing Stage
NHK SPRING CO., Ltd.
0 cites
US12338852
2025
Joined Body
NHK Spring Co., Ltd.
0 cites
US12247296
2025
Member for Plasma Processing Device
IZUMI TECHNO Inc.
0 cites