5 Patents
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- US122101912025Optical Coupling Device and Method for Manufacturing Optical Coupling Device
Orbray Co., Ltd.
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- US120258362024Optical Coupling Device and Method for Manufacturing Optical Coupling Device
Orbray Co., Ltd.
0 cites - US120273472024Plasma Processing Apparatus and High-frequency Power Application Method of Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
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