Patents/Inventors

Masaru Kurihara

TokyoJP2 patents

3 Patents

US119878802024
Manufacturing Method and Inspection Method of Interior Member of Plasma Processing Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites
US119072352024
Plasma Processing Apparatus Including Predictive Control
Hitachi High-tech Corporation
0 cites
US116570592023
Search Device, Searching Method, and Plasma Processing Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites