11 Patents
- US126032532026Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium
Kokusai Electric Corporation
0 cites - US125753472026Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
Kokusai Electric Corporation
0 cites - US125060022025Method of Manufacturing Semiconductor Device Using Plasma to Modify Surface of Silicon-containing Films Exposed in Trench Structure, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites - US121958542025Substrate Processing Apparatus, Method of Processing Substrate, Method of Manufacturing Semiconductor Device, and Recording Medium
Kokusai Electric Corporation
0 cites - US121548262024Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites - US121069982024Substrate Processing Apparatus, Substrate Processing Method, Non-transitory Computer-readable Recording Medium and Method of Manufacturing Semiconductor Device
Kokusai Electric Corporation
0 cites - US120401612024Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Kokusai Electric Corporation
0 cites - US119055962024Method of Manufacturing Semiconductor Device, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites - US119086822024Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
Kokusai Electric Corporation
0 cites - 0 cites
- US116642752023Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites