9 Patents
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- US125911732026Substrate with Multilayer Reflective Film, Reflective Mask Blank, Reflective Mask, and Method for Manufacturing Semiconductor Device
HOYA CORPORATION
0 cites - US125720652026Substrate with Conductive Film, Reflective Mask Blank, Reflective Mask, and Method for Manufacturing Semiconductor Device
HOYA CORPORATION
0 cites - US123460172025Substrate with Multilayer Reflective Film, Reflective Mask Blank, Reflective Mask, and Method for Manufacturing Semiconductor Device
HOYA CORPORATION
0 cites - US123139682025Reflective Mask Blank, Reflective Mask, and Method for Manufacturing Semiconductor Device
HOYA CORPORATION
0 cites - US120726192024Reflective Mask Blank, Reflective Mask, and Method for Manufacturing Reflective Mask and Semiconductor Device
HOYA CORPORATION
0 cites - US120193662024Reflective Mask Blank, Reflective Mask, and Method for Manufacturing Reflective Mask and Semiconductor Device
HOYA CORPORATION
0 cites - US116504942023Substrate with a Multilayer Reflective Film, Reflective Mask Blank, Reflective Mask, and Semiconductor Device Manufacturing Method
HOYA CORPORATION
0 cites