Patents/Inventors

Masanori Hosoya

MiyagiJP3 patents

4 Patents

US120149302024
Etching Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119553422024
Method of Etching and Apparatus for Plasma Processing
TOKYO ELECTRON LIMITED
0 cites
US117106432023
Method of Etching and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117106442023
Etching Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites