Patents/Inventors

Masamichi Yachi

ToyamaJP1 patent

2 Patents

US123659822025
Processing Apparatus and Exhaust System
KOKUSAI ELECTRIC CORPORATION
0 cites
US118460252023
Substrate Processing Apparatus Capable of Adjusting Inner Pressure of Process Chamber Thereof and Method Therefor
KOKUSAI ELECTRIC CORPORATION
0 cites