Patents/Inventors

Masami Oikawa

OshuJP4 patents

5 Patents

US122527862025
Cleaning Method and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US120172612024
Processing Apparatus and Cleaning Processing Method
TOKYO ELECTRON LIMITED
0 cites
US119268912024
Cleaning Method and Processing Apparatus
Tokyo Electron Limited
0 cites
US118942492024
Control Device, Processing Apparatus, and Control Method
TOKYO ELECTRON LIMITED
0 cites
US117452312023
Cleaning Method and Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites