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Inventors
Masami Makuuchi
Tokyo
JP
2 patents
3 Patents
US12422377
2025
Defect Inspection Apparatus and Defect Inspection Method
Hitachi High-tech Corporation
0 cites
US12276618
2025
Defect Inspection Device
Hitachi High-tech Corporation
0 cites
US12044627
2024
Defect Inspection Device and Defect Inspection Method
Hitachi High-tech Corporation
0 cites