Patents/Inventors

Masami Akimoto

KoshiJP9 patents

8 Patents

US125711202026
Plating Apparatus
TOKYO ELECTRON LIMITED
0 cites
US125575912026
Linearly Moving Mechanism and Method of Suppressing Particle Scattering
TOKYO ELECTRON LIMITED
0 cites
US124630642025
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123984612025
Substrate Cleaning Apparatus and Substrate Cleaning Method
TOKYO ELECTRON LIMITED
0 cites
US122760272025
Substrate Processing Apparatus and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US121319192024
Substrate Cleaning Apparatus and Substrate Cleaning Method
TOKYO ELECTRON LIMITED
0 cites
US116370352023
Substrate Processing Apparatus with Moving Device for Connecting and Disconnecting Heater Electrodes and Substrate Processing Method Thereof
TOKYO ELECTRON LIMITED
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US115519452023
Substrate Processing Apparatus Including Periphery Cover Body
TOKYO ELECTRON LIMITED
0 cites