Patents/Inventors

Masaki Ozaki

TokyoJP2 patents

3 Patents

US118878772024
Electrostatic Chuck Device
SUMITOMO OSAKA CEMENT CO., Ltd.
0 cites
US118482232023
Electrostatic Chuck Device and Method for Producing Electrostatic Chuck Device
SUMITOMO OSAKA CEMENT CO., Ltd.
0 cites
US116642612023
Electrostatic Chuck Device
SUMITOMO OSAKA CEMENT CO., Ltd.
0 cites