Patents/Inventors

Masaki Nakano

OyamaJP4 patents

3 Patents

US125138082025
Extreme Ultraviolet Light Generation Apparatus and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US124395032025
Target Supply Device and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US123472862025
Water Area Monitoring Device, Water Area Monitoring System, Water Area Monitoring Method, and Recording Medium
NEC CORPORATION
0 cites