Patents/Inventors

Masaki Kinoshita

TokyoJP16 patents

7 Patents

US126000072026
Polishing Apparatus and Polishing Method
EBARA CORPORATION
0 cites
US125042732025
Measuring Film-thickness of a Workpiece in a Semiconductor Processing Apparatus Using a Composite Spectrum
EBARA CORPORATION
0 cites
US123251012025
Polishing Apparatus and Polishing Method
EBARA CORPORATION
0 cites
US119515882024
Optical Film-thickness Measuring Apparatus and Polishing Apparatus
EBARA CORPORATION
0 cites
US119118672024
Polishing Apparatus and Polishing Method
EBARA CORPORATION
0 cites
US116732242023
Light Transmitting Member, Polishing Pad, and Substrate Polishing Apparatus
EBARA CORPORATION
0 cites
US116427532023
Polishing-pad Laminated Structure, Polishing-pad Positioning Instrument, and Method of Attaching a Polishing Pad to a Polishing Table
EBARA CORPORATION
0 cites