16 Patents
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- US121486332024Plasma Processing Apparatus and Method for Releasing Sample
HITACHI HIGH-TECH CORPORATION
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- US120504552024State Prediction Apparatus and Semiconductor Manufacturing Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites - US120401672024Diagnosis Apparatus, Plasma Processing Apparatus and Diagnosis Method
HITACHI HIGH-TECH CORPORATION
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- US116642332023Method for Releasing Sample and Plasma Processing Apparatus Using Same
HITACHI HIGH-TECH CORPORATION
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