Patents/Inventors

Masakazu Sakata

ToyamaJP2 patents

2 Patents

US125406952026
Conversion Pipe Arrangement, Substrate Processing Apparatus, Method of Processing Substrate, and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites
US123659822025
Processing Apparatus and Exhaust System
KOKUSAI ELECTRIC CORPORATION
0 cites