Patents/Inventors

Masahito Sugiura

NirasakiJP5 patents

5 Patents

US125348002026
Pre-coating Method and Processing Apparatus
Tokyo Electron Limited
0 cites
US124566202025
Film-forming Method
TOKYO ELECTRON LIMITED
0 cites
US120183752024
Flim Forming Method of Carbon-containing Film by Microwave Plasma
TOKYO ELECTRON LIMITED
0 cites
US120149072024
Method and Device for Forming Graphene Structure
Tokyo Electron Limited
0 cites
US119729292024
Processing Apparatus and Film Forming Method
Tokyo Electron Limited
0 cites