Patents/Inventors

Masahiro Nagatani

TokyoJP2 patents

3 Patents

US121547652024
Plasma Processing Apparatus and Plasma Processing Method
HITACHI HIGH-TECH CORPORATION
0 cites
US120464562024
Inspection Method of Plasma Processing Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites
US117767922023
Plasma Processing Apparatus and Plasma Processing Method
HITACHI HIGH-TECH CORPORATION
0 cites