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Inventors
Masahiro Fukuta
Tokyo
JP
3 patents
4 Patents
US12469664
2025
Charged Particle Gun and Charged Particle Beam System
Hitachi High-tech Corporation
0 cites
US11990311
2024
Charged Particle Source and Charged Particle Beam Device
Hitachi High-tech Corporation
0 cites
US11929230
2024
Electron Source and Charged Particle Beam Device
HITACHI HIGH-TECH CORPORATION
0 cites
US11651929
2023
Charged Particle Source and Charged Particle Beam Device
Hitachi High-tech Corporation
0 cites