Patents/Inventors

Masahiko Yokoi

MiyagiJP5 patents

4 Patents

US125801542026
Etching Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US124008632025
Method for Etching for Semiconductor Fabrication
TOKYO ELECTRON LIMITED
0 cites
US123680502025
Plasma Processing Method and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US123082122025
In-situ Adsorbate Formation for Plasma Etch Process
Tokyo Electron Limited
0 cites