Patents/Inventors

Masahiko Harumoto

KyotoJP4 patents

3 Patents

US125086232025
Substrate Processing Method
SCREEN HOLDINGS CO., Ltd.
0 cites
US121192422024
Film Processing Method
SCREEN HOLDINGS CO., Ltd.
0 cites
US119868532024
Substrate Processing Apparatus, Film Formation Unit, Substrate Processing Method and Film Formation Method
SCREEN HOLDINGS CO., Ltd.
0 cites