Mary Anne Manumpil

5 Patents

• US125867652026

  Surface Modification for Metal-containing Photoresist Deposition

  Lam Research Corporation

  0 cites
• US124746382025

  Underlayer for Photoresist Adhesion and Dose Reduction

  Lam Research Corporation

  0 cites
• US124354122025

  High Density, Modulus, and Hardness Amorphous Carbon Films at Low Pressure

  Lam Research Corporation

  0 cites
• US120625372024

  High Etch Selectivity, Low Stress Ashable Carbon Hard Mask

  LAM RESEARCH CORPORATION

  0 cites
• US119889652024

  Underlayer for Photoresist Adhesion and Dose Reduction

  Lam Research Corporation

  0 cites