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Martin Ebert
Fremont, CA
US
6 patents
6 Patents
US12562334
2026
Multi-beam Charged Particle Column
ASML Netherlands B.V.
0 cites
US12339493
2025
Photonic Chip and Method of Manufacture
University Of Southampton
0 cites
US12204826
2025
Method and Apparatus for Inspection and Metrology
ASML NETHERLANDS B.V.
0 cites
US12189182
2025
Photonic Chip and Method of Manufacture
University Of Southampton
0 cites
US11874540
2024
Capacitor Resonator Modulator
University Of Southampton
0 cites
US11580274
2023
Method and Apparatus for Inspection and Metrology
ASML NETHERLANDS B.V.
0 cites