5 Patents
- 0 cites
- US120722672024Method and Hardware for Post Maintenance Vacuum Recovery System
Applied Materials, Inc.
0 cites - US120377012024Multi-thermal CVD Chambers with Shared Gas Delivery and Exhaust System
Applied Materials, Inc.
0 cites - US118609732024Method and System for Foreline Deposition Diagnostics and Control
Applied Materials, Inc.
0 cites - US116353382023Rapid Chamber Vacuum Leak Check Hardware and Maintenance Routine
Applied Materials, Inc.
0 cites