Patents/Inventors

Martijn Petrus Christianus Van Heumen

Santa Clara, CAUS6 patents

7 Patents

US123548912025
Particle Beam Inspection Apparatus
ASML Netherlands B.V.
0 cites
US122494802025
Fluid Transfer System in a Charged Particle System
ASML Netherlands B.V.
0 cites
US122179302025
Systems and Methods for Thermally Conditioning a Wafer in a Charged Particle Beam Apparatus
ASML Netherlands B.V.
0 cites
US119962622024
Fluid Transfer System in a Charged Particle System
ASML Netherlands B.V.
0 cites
US119423402024
Particle Beam Inspection Apparatus
ASML Netherlands B.V.
0 cites
US118043582023
System and Methods for Thermally Conditioning a Wafer in a Charged Particle Beam Apparatus
ASML Netherlands B.V.
0 cites
US117640272023
Systems and Methods of Cooling Objective Lens of a Charged-particle Beam System
ASML Netherlands B.V.
0 cites