Martijn Maria Zaal

2 Patents

• US117106682023

  Method and Apparatus to Determine a Patterning Process Parameter

  ASML NETHERLANDS B.V.

  0 cites
• US116044192023

  Method of Determining Information About a Patterning Process, Method of Reducing Error in Measurement Data, Method of Calibrating a Metrology Process, Method of Selecting Metrology Targets

  ASML NETHERLANDS B.V.

  0 cites