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Inventors
Marten Oldsen
Anzing
DE
5 patents
5 Patents
US12534360
2026
Generating a MEMS Device with Glass Cover and MEMS Device
Infineon Technologies AG
0 cites
US12415719
2025
MEMS Sensor with Particle Filter and Method for Producing It
Infineon Technologies AG
0 cites
US12188839
2025
Sensor Device Including Sensor Unit for a Gaseous Medium
Infineon Technologies AG
0 cites
US11774308
2023
Sensor Device Including Sensor Unit for a Gaseous Medium
Infineon Technologies AG
0 cites
US11703681
2023
MEMS Devices Comprising Spring Element and Comb Drive and Associated Production Methods
Infineon Technologies AG
0 cites