8 Patents
- 0 cites
- US123990642025Systems and Methods for Thermal Processing and Temperature Measurement of a Workpiece at Low Temperatures
Mattson Technology, Inc.
0 cites - US124009162025Transmission-based Temperature Measurement of a Workpiece in a Thermal Processing System
Mattson Technology, Inc.
0 cites - US121746162024Control System for Adaptive Control of a Thermal Processing System
Mattson Technology, Inc.
0 cites - US120274272024Preheat Processes for Millisecond Anneal System
Beijing E-town Semiconductor Technology Co., Ltd.
0 cites - US119553882024Transmission-based Temperature Measurement of a Workpiece in a Thermal Processing System
Mattson Technology, Inc.
0 cites - US116448172023Control System for Adaptive Control of a Thermal Processing System
MATTSON TECHNOLOGY, Inc.
0 cites - US116108242023Transmission-based Temperature Measurement of a Workpiece in a Thermal Processing System
MATTSON TECHNOLOGY, Inc.
0 cites