Patents/Inventors

Markus Holz

AalenDE1 patent

2 Patents

US121641022024
Method for Generating a Mathematical Model for Positioning Individual Mirrors of a Facet Mirror in an Optical System
CARL ZEISS SMT GmbH
0 cites
US117893672023
Facet Mirror for an Illumination Optical Unit of a Projection Exposure Apparatus
Carl Zeiss SMT GmbH
0 cites