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Markus Hagedorn
Ulm
DE
1 patent
2 Patents
US12476151
2025
Preheat Processes for Millisecond Anneal System
Mattson Technology, Inc.
0 cites
US12027427
2024
Preheat Processes for Millisecond Anneal System
Beijing E-town Semiconductor Technology Co., Ltd.
0 cites