Patents/Inventors

Markus Eibl

PlaneggDE9 patents

2 Patents

US126047012026
Modular Wafer-chuck System
ATT Advanced Temperature Test Systems GmbH
0 cites
US118219412023
Method for Open-loop or Closed-loop Control of the Temperature of a Chuck for a Wafer, Temperature Adjustment Device, and Wafer Testing System
ATT ADVANCED TEMPERATURE TEST SYSTEM GmbH
0 cites