16 Patents
- US125654662026Synthesis and Use of Precursors for Vapor Deposition of Tungsten Containing Thin Films
ASM IP HOLDING B.V.
0 cites - US125326742026Methods and Apparatus for Depositing a Chalcogenide Film and Structures Including the Film
ASM IP Holding B.V.
0 cites - US123659882025Atomic Layer Deposition and Etching of Transition Metal Dichalcogenide Thin Films
ASM IP Holding B.V.
0 cites - 0 cites
- 0 cites
- US121192202024Methods for Filling a Gap Feature on a Substrate Surface and Related Semiconductor Structures
ASM IP Holding B.V.
0 cites - US121069652024Methods for Forming a Metallic Film on a Substrate by Cyclical Deposition and Related Semiconductor Device Structures
ASM IP Holding B.V.
0 cites - US119591712024Methods of Forming a Transition Metal Containing Film on a Substrate by a Cyclical Deposition Process
ASM IP Holding B.V.
0 cites - US119526582024Cyclic Deposition Methods for Forming Metal-containing Material and Films and Structures Including the Metal-containing Material
ASM IP Holding B.V.
0 cites - US118144002023Synthesis and Use of Precursors for ALD of Tellurium and Selenium Thin Films
ASM International N.V.
0 cites - US118147152023Cyclic Deposition Methods for Forming Metal-containing Material and Films and Structures Including the Metal-containing Material
ASM IP Holding B.V.
0 cites - 0 cites
- US116675952023Synthesis and Use of Precursors for Vapor Deposition of Tungsten Containing Thin Films
ASM IP HOLDING B.V.
0 cites - US116437282023Atomic Layer Deposition and Etching of Transition Metal Dichalcogenide Thin Films
ASM IP Holding B.V.
0 cites - US115426002023Synthesis and Use of Precursors for ALD of Group VA Element Containing Thin Films
ASM IP HOLDING B.V.
0 cites