Markku Leskela

4 Patents

• US123659812025

  Synthesis and Use of Precursors for ALD of Molybdenum or Tungsten Containing Thin Films

  ASM IP Holding B.V.

  0 cites
• US118210842023

  Atomic Layer Deposition of Rhenium Containing Thin Films

  ASM IP Holding, B.V.

  0 cites
• US116241122023

  Synthesis and Use of Precursors for ALD of Molybdenum or Tungsten Containing Thin Films

  ASM IP HOLDING B.V.

  0 cites
• US115552422023

  Precursors and Methods for Atomic Layer Deposition of Transition Metal Oxides

  ASM INTERNATIONAL N.V.

  0 cites