Mark V. Smith

6 Patents

• US123157492025

  Methods of Installing a Purge Fluid Conditioning Element Into a Semiconductor Substrate Carrying Container

  ENTEGRIS, Inc.

  0 cites
• US122550842025

  Handle for Wafer Carrier

  ENTEGRIS, Inc.

  0 cites
• US119012052024

  Membrane Diffuser for a Substrate Container

  ENTEGRIS, Inc.

  0 cites
• US118697872024

  Substrate Container Valve Assemblies

  ENTEGRIS, Inc.

  0 cites
• US116107952023

  Membrane Diffuser for a Substrate Container

  ENTEGRIS, Inc.

  0 cites
• US115519572023

  Purge Connectors and Modules for a Substrate Container

  ENTEGRIS, Inc.

  0 cites