Patents/Inventors

Mark Leonard O'neill

Queen Creek, AZUS10 patents

10 Patents

US122343832025
Low Dishing Oxide CMP Polishing Compositions for Shallow Trench Isolation Applications and Methods of Making Thereof
Versum Materials US, LLC
0 cites
US122304962025
Organoaminosilane Precursors and Methods for Depositing Films Comprising Same
VERSUM MATERIALS US, LLC
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US120915812024
High Oxide Film Removal Rate Shallow Trench (STI) Chemical Mechanical Planarization (CMP) Polishing
Versum Materials US, LLC
0 cites
US117251112023
Compositions and Processes for Depositing Carbon-doped Silicon-containing Films
Versum Materials US, LLC
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US116921102023
Low Oxide Trench Dishing Chemical Mechanical Polishing
Versum Materials US, LLC
0 cites
US116678392023
Low Oxide Trench Dishing Chemical Mechanical Polishing
Versum Materials US, LLC
0 cites
US116435992023
Tungsten Chemical Mechanical Polishing for Reduced Oxide Erosion
VERSUM MATERIALS US, LLC
0 cites
US116262792023
Compositions and Methods for Making Silicon Containing Films
Versum Materials US, LLC
0 cites
US116084512023
Shallow Trench Isolation (STI) Chemical Mechanical Planarization (CMP) Polishing with Tunable Silicon Oxide and Silicon Nitride Removal Rates
VERSUM MATERIALS US, LLC
0 cites
US115490342023
Oxide Chemical Mechanical Planarization (CMP) Polishing Compositions
VERSUM MATERIALS US, LLC
0 cites