Patents/Inventors

Mark Johannes Hermanus Frencken

IttervoortNL1 patent

3 Patents

US118605462024
Fluid Handling Structure for Lithographic Apparatus
ASML NETHERLANDS B.V.
0 cites
US118605542024
Object Positioner, Method for Correcting the Shape of an Object, Lithographic Apparatus, Object Inspection Apparatus, Device Manufacturing Method
ASML NETHERLANDS B.V.
0 cites
US115795332023
Substrate Holder, a Lithographic Apparatus and Method of Manufacturing Devices
ASML NETHERLANDS B.V.
0 cites