Patents/Inventors

Mark Ghinovker

Yoqneam IlitIL18 patents

16 Patents

US125608712026
Metrology Target for Scanning Metrology
KLA Corporation
0 cites
US125108312025
Robust and Accurate Overlay Target Design for CMP
KLA Corporation
0 cites
US124826872025
Single Cell In-die Metrology Targets and Measurement Methods
KLA Corporation
0 cites
US124238032025
Predicting Tool Induced Shift Using Moiré Overlay Targets
KLA Con
0 cites
US122042542025
Multi-layered Moiré Targets and Methods for Using the Same in Measuring Misregistration of Semiconductor Devices
KLA CORPORATION
0 cites
US121054332024
Imaging Overlay Targets Using Moiré Elements and Rotational Symmetry Arrangements
KLA Corporation
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US120941002024
Measurement of Stitching Error Using Split Targets
KLA Corporation
0 cites
US120558592024
Overlay Mark Design for Electron Beam Overlay
0 cites
US120136342024
Reduction or Elimination of Pattern Placement Error in Metrology Measurements
KLA-TENCOR CORPORATION
0 cites
US118746052024
Verification Metrology Targets and Their Design
KLA Corporation
0 cites
US118625242024
Overlay Mark Design for Electron Beam Overlay
0 cites
US118090902023
Composite Overlay Metrology Target
KLA Corporation
0 cites
US117748632023
Induced Displacements for Improved Overlay Error Metrology
KLA CORPORATION
0 cites
US117200312023
Overlay Design for Electron Beam and Scatterometry Overlay Measurements
KLA Corporation
0 cites
US117037672023
Overlay Mark Design for Electron Beam Overlay
0 cites
US116865762023
Metrology Target for One-dimensional Measurement of Periodic Misregistration
KLA Corporation
0 cites