Patents/Inventors

Mark D. Smith

San Jose, CAUS10 patents

10 Patents

US125796312026
Method to Calibrate, Predict, and Control Stochastic Defects in EUV Lithography
KLA Corporation
0 cites
US125617902026
Method to Calibrate, Predict, and Control Stochastic Defects in EUV Lithography
KLA Corporation
0 cites
US125617912026
Method to Calibrate, Predict, and Control Stochastic Defects in EUV Lithography
KLA Corporation
0 cites
US124812232025
System and Method for Optimizing Through Silicon via Overlay
KLA Corporation
0 cites
US121971372025
System and Method for Determining Post Bonding Overlay
KLA Corporation
0 cites
US121642772024
System and Method for Mitigating Overlay Distortion Patterns Caused by a Wafer Bonding Tool
KLA Corporation
0 cites
US121173472024
Metrology Target Design for Tilted Device Designs
KLA Corporation
0 cites
US118290772023
System and Method for Determining Post Bonding Overlay
KLA Corporation
0 cites
US117824112023
System and Method for Mitigating Overlay Distortion Patterns Caused by a Wafer Bonding Tool
KLA Corporation
0 cites
US116825702023
Process-induced Displacement Characterization During Semiconductor Production
KLA Corporation
0 cites