Mark Constant Johannes Baggen

4 Patents

• US123065442025

  Metrology Tool with Position Control of Projection System

  ASML NETHERLANDS B.V.

  0 cites
• US122495352025

  Substrate Holder for Use in a Lithographic Apparatus

  ASML NETHERLANDS B.V.

  0 cites
• US118986012024

  Support Table for a Lithographic Apparatus, Method of Loading a Substrate, Lithographic Apparatus and Device Manufacturing Method

  ASML NETHERLANDS B.V.

  0 cites
• US117495562023

  Substrate Holder for Use in a Lithographic Apparatus

  ASML NETHERLANDS B.V.

  0 cites