Patents/Inventors

Mariusch Gregor

Gilroy, CAUS5 patents

6 Patents

US122531902025
Non-elastomeric, Non-polymeric, Non-metallic Membrane Valves for Semiconductor Processing Equipment
Lam Research Corporation
0 cites
US122154212025
Systems and Methods for Pulse Width Modulated Dose Control
LAM RESEARCH CORPORATION
0 cites
US121069462024
Turbomolecular Pump and Cathode Assembly for Etching Reactor
Lam Research Corporation
0 cites
US118347362023
Systems and Methods for Pulse Width Modulated Dose Control
LAM RESEARCH CORPORATION
0 cites
US117960852023
Non-elastomeric, Non-polymeric, Non-metallic Membrane Valves for Semiconductor Processing Equipment
Lam Research Corporation
0 cites
US115425982023
Systems and Methods for Pulse Width Modulated Dose Control
Lam Research Corporation
0 cites