Patents/Inventors

Mario Laengle

JenaDE2 patents

2 Patents

US121587032024
Method for Reproducing a Target Wavefront of an Imaging Optical Production System, and Metrology System for Carrying Out the Method
Carl Zeiss SMT GmbH
0 cites
US116472882023
Device for Measuring Masks for Microlithography and Autofocusing Method
Carl Zeiss SMT GmbH
0 cites